@Article{SCI:Kir2001c, author = "R.M. Kirby and G.E. Karniadakis and O. Mikulchenko and K. Mayaram", title = "An Integrated Simulator for Coupled Domain Problems in MEMS", journal = "Journal of Microelectromechanical Systems", volume = "10", number = "3", pages = "379--399", year = "2001", }